Bi-Layer Resist Recipe.

C.S.Allen 08.10.2012

• Spin PMMA 495 A8 (spin recipe ALEXPMMA)
• Bake on hotplate at 180C for 90s
• Spin PMMA 950 A8 (spin recipe ALEXPMMA)
• Bake on hotplate at 180C for 90s
• Expose at a dose of 800-850 uC/cm2
• Develop in MBIK:IPA (3:1) at 25C for 10s

Negative Resist Recipe.

C.S.Allen 08.10.2012

• Spin man-2405 (spin recipe man2405)
• Bake on hotplate at 90C for 180s
• Expose at a dose of 400 uC/cm2
• Develop in ......